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Equipment (Sorted by Equipment Category)
Equipment
Category
Room
CNC micro milling machine
Back End Processing
1414
Disco Automatic Dicing Saw 3220
Back End Processing
1414
PDMS Clean Space
Back End Processing
1414
QuikLaze-50 ST2
Back End Processing
1435
Thinky Mixer
Back End Processing
1414
Tousimis AutoSamdri 815A
Back End Processing
1420
Tousimis Autosamdri 815B
Back End Processing
1435
TPT Wedge/Ball Bonder
Back End Processing
1414
UVO Cleaner
Back End Processing
1416
Vapor treatment
Back End Processing
1413
West Bond Ball Bonder
Back End Processing
1414
West Bond Wedge Bonder
Back End Processing
1414
Idonus HF VPE-150
Dry Etching
1443
Oxford Plasmalab 100 RIE/ICP
Dry Etching
1439
Oxford Plasmalab 80+ RIE
Dry Etching
1439
Plasma Etch PE100
Dry Etching
1439
Plasma-Therm SLR RIE/ICP Plasma Etch System
Dry Etching
1439
PVA TePla PS100
Dry Etching
1439
Trion RIE/ICP Dry Etcher
Dry Etching
1439
Xactix XeF2 Etcher
Dry Etching
1439
GDSII Editor PC
Ebeam Lithography
2400A
GDSII Editor PC #2
Ebeam Lithography
1416
Vistec EBPG 5200
Ebeam Lithography
1409
FEI Apreo SEM
Materials Characterization
1420
FEI Quanta FEG 250
Materials Characterization
1420
FEI Scios DualBeam FIB/SEM
Materials Characterization
1420
Microfluidics Workstation - Valves controller
Materials Characterization
1414
Thermofisher Talos F200X G2 S/TEM
Materials Characterization
1416A
Veeco Scanning Probe Microscope
Materials Characterization
1420
Zeiss Sigma 500
Materials Characterization
1416
AJA DC Sputter Deposition Tool
Metalization / Thin Film Deposition
1435
AJA RF Sputter Deposition Tool
Metalization / Thin Film Deposition
1435
Beneq TFS200 Atomic Layer Deposition
Metalization / Thin Film Deposition
1429
Denton 502A Thermal Evaporator
Metalization / Thin Film Deposition
1423
Denton Desk IV Sputter Coater
Metalization / Thin Film Deposition
1405
Denton Discovery 18 Sputter System
Metalization / Thin Film Deposition
1425
Denton Discovery 635 Sputter System
Metalization / Thin Film Deposition
1423
Emitech K575X Sputter Coater
Metalization / Thin Film Deposition
1420
Oxford Plasmalab 80+ PECVD
Metalization / Thin Film Deposition
1429
PDS 2010 Parylene Coater
Metalization / Thin Film Deposition
1423
Plasma-Therm SLR PECVD
Metalization / Thin Film Deposition
1429
Temescal BJD 1800 Ebeam Evaporator (1)
Metalization / Thin Film Deposition
1425
Temescal BJD 1800 Ebeam Evaporator (2)
Metalization / Thin Film Deposition
1425
Agilent B1500A Semiconductor Device Analyzer
Metrology
1416
Axio Fluorescence Microscope
Metrology
1420
Dektak 150
Metrology
1419
DektakXT Stylus Profilometer
Metrology
1419
Filmetrics F20
Metrology
1417
Filmetrics F20 (2)
Metrology
1409
Filmetrics Profilm3D Optical Profiler
Metrology
1420
HP 4155 Parametric Analyzer/Probe Station
Metrology
1419
J.A. Woollam M-2000D Spectroscopic Ellipsometer
Metrology
1419
Jandel Four Point Probe with RM3000 Test Unit
Metrology
1419
Keyence VHX1000
Metrology
1414
Rudolph Auto EL Ellipsometer
Metrology
1419
Toho Technology FLX-2320 Thin Film Stress Measurement System
Metrology
1419
Veeco NT1100 Optical Profiling System
Metrology
1419
Zeiss Axio Imager Optical Microscope
Metrology
1409
EVG620 Lithography/NIL System
Photolithography
1413
Heidelberg MLA150 Laser Writer
Photolithography
1405
HTG Mask Aligner
Photolithography
1405
Karl Suss MA6 Mask Aligner
Photolithography
1413
Karl Suss MJB3 Mask Aligner
Photolithography
1413
AccuThermo AW 610 RTP (1)
Thermal Processing
1431
AccuThermo AW 610 RTP (2)
Thermal Processing
1431
Carbolite HTCR 6/28 High Temperature Clean Room Oven
Thermal Processing
1443
Carver Hot Embossing System
Thermal Processing
1414
Fisher Oven
Thermal Processing
1416
Hot Laminator - GBC Catena 35
Thermal Processing
1405
Lindberg Mini-Mite Tube Furnace
Thermal Processing
1416
Ulvac MILA-3000 Minilamp Annealer
Thermal Processing
1431
