The Veeco NT1100 optical profiler provides accurate, non- contact surface metrology for applications in MEMS, thick films, optics, ceramics, advanced materials and more. The system utilizes white light interferometry for high resolution 3D surface measurements, from sub - nanometer roughness to millimeter- high steps (0.1 nm - 1mm range). The system is equipped with an automated stitching stage for substrates up to 4 inches in diameter.