The Oxford PlasmaLab 80+ is an 8-inch diameter parallel plate, turbo-pumped system, configured for RIE of SiNx, SiOx and more. Graphite cover plate. 30/300 Watt 13.56 MHz HF generator. Automatch unit connected to lower electrode provides substrate bias. Available gases are CF4, O2, SF6, Ar, BCl3, Cl2 and CHF3.