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Room 1439 - Dry Etching
Equipment:
Oxford Plasmalab 100 RIE/ICP
Oxford Plasmalab 80+ RIE
Plasma Etch PE100
Plasma-Therm SLR RIE/ICP Plasma Etch System
PVA TePla PS100
Trion RIE/ICP Dry Etcher
Xactix XeF2 Etcher
Oxford Plasmalab 100 RIE/ICP
Oxford Plasmalab 80+ RIE
Trion RIE/ICP Dry Etcher
Plasma Etch PE100
Plasma-Therm SLR RIE/ICP Plasma Etch System
PVA TePla PS100
Xactix XeF2 Etcher