J.A. Woollam M-2000D Spectroscopic Ellipsometer
The J.A. Woollam M-2000D spectroscopic ellipsometer is a powerful and versatile tool for thin film characterization. It uses patented RCE (rotating compensator ellipsometer) technology to achieve high accuracy and precision. It has 500 wavelengths in the range of 193-1000 nm, fast data acquisition speed, and mapping capability. Angle of Incidence can be changed from 45°-90° (with Automated Angle Base), maximum substrate thickness is 18 mm. Beam size: 3mm (300um with Focusing Optics installed by requesting staff assistance). Beam divergence: < 0.3° (without focusing).
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