Nano3: Equipment

Name:

HP 4155 Parametric Analyzer/Probe Station

Equipment Type:

Description:

Employs four source/monitor units (SMUs), two voltage source units (VSUs) and two voltage measurement units (VMUs) for measuring and analyzing semiconductor device characteristics.

1419

Metrology

Toho Technology FLX-2320 Thin Film Stress Measurement System		HP 4155 Parametric Analyzer/Probe Station	DektakXT Stylus Profilometer	Dektak 150		Veeco NT1100 Optical Profiling System
J.A. Woollam M-2000D Spectroscopic Ellipsometer		Rudolph Auto EL Ellipsometer				Jandel Four Point Probe with RM3000 Test Unit

PLEASE USE FOM FOR EQUIPMENT RESERVATIONS