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Equipment
Name:
HP 4155 Parametric Analyzer/Probe Station
Equipment Type:
Metrology
Description:
Employs four source/monitor units (SMUs), two voltage source units (VSUs) and two voltage measurement units (VMUs) for measuring and analyzing semiconductor device characteristics.
Location
1419
Metrology
Toho Technology FLX-2320 Thin Film Stress Measurement System
HP 4155 Parametric Analyzer/Probe Station
DektakXT Stylus Profilometer
Dektak 150
Veeco NT1100 Optical Profiling System
J.A. Woollam M-2000D Spectroscopic Ellipsometer
Rudolph Auto EL Ellipsometer
Jandel Four Point Probe with RM3000 Test Unit
PLEASE USE FOM FOR EQUIPMENT RESERVATIONS