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Equipment
Equipment
Category
Room
Trion RIE/ICP Dry Etcher
Dry Etching
1439
Oxford Plasmalab 100 RIE/ICP
Dry Etching
1439
PVA TePla PS100
Dry Etching
1439
Oxford Plasmalab 80+ RIE
Dry Etching
1439
Xactix XeF2 Etcher
Dry Etching
1439
Plasma Etch PE100
Dry Etching
1439
Idonus HF VPE-150
Dry Etching
1443
Plasma-Therm SLR RIE/ICP Plasma Etch System
Dry Etching
1439
