Nano3 is the main facility of the San Diego Nanotechnology Infrastructure (SDNI), which is one of 16 nation-wide sites of the NSF supported National Nanotechnology Coordinated Infrastructure (NNCI) founded in 2015.

Nano3 provides advanced capabilities for fabrication and characterization in a state-of-the-art cleanroom opened in May 2006.

The name Nano3 reflects the synergetic nature of the facility, focusing on three fields of nanoscale research and development within the space - Nanoscience, Nanoengineering and Nanomedicine.

In addition to providing essential nanofabrication capabilities for research on electronic and optoelectronic materials and devices, the facility facilitates the pursuit of research in emerging, interdisciplinary, and rapidly growing fields such as biomedical and biochemical devices, heterogeneous integrated devices and circuits, and sensor technology.

We are excited to announce that our new, state-of-the-art Thermofisher Talos F200X Scanning/Transmission Electron Microscope (S/TEM) is installed and operational. The equipment is optimized for materials characterization and includes high-end chemical analysis capabilities (EDX, EELS). Nano3 can now offer S/TEM training, access for independent use, and also direct imaging services to our academic and industry user community.

Specifications of our Thermofisher Talos F200X system include:

• 200 kV FEG Scanning Transmission Electron Microscope.
• STEM imaging with Bright-field (BF), Dark-field (DF), and High-angle annular dark-field (HAADF) detectors.
• Energy dispersive X-ray spectroscopy (EDS) characterization with compositional mapping using 4 in-column SDD Super-X windowless detectors.
• EELS analysis by using Gatan's Enfinium ER (977) spectrometer with UltraFast DualEELS spectrum (simultaneous acquisition of low-loss and core-loss spectra).
• Tomography data acquisition and Avizo data visualization and analysis.
• HR TEM line resolution: 0.1nm. HR STEM resolution: 0.16nm. EDS resolution: ≤136eV for Mn-Kα and 10kcps output. EELS resolution: 0.8eV.

For more details, please contact Dr. Jeff Wu at jianfengwu@ucsd.edu or 858-534-6676.

Nano3 offers a variety of short courses which provide training for some of the basic micro and nanofabrication techniques possible in Nano3. These courses provide a starting point for users interested in accomplishing a variety of processing goals.

The training sessions will be scheduled based on demand. Please visit Nano3 Training Courses for more information.

Please remember that before you can sign up for any of these trainings you must complete all Nano3 access requirements.