facilities
Facility User Rates
cleanroom floorplan
personnel
Courses
equipment
all equipment
Back End Processing
Dry Etching
Ebeam Lithography
Materials Characterization
Metalization / Thin Film Deposition
Metrology
Photolithography
Thermal Processing
access
UCSD Internal Users
UC System Users
Non-UC System External Users
Safety
Statement
Evacuation Map
Resources
Services
Fabrication and Characterization
E-Beam Lithography
Dicing
Focused Ion Beam
Microfluidics
Transmission Electron Microscopy
Login
username:
password:
Remember me on this computer:
Lost username/ password
Equipment
Name:
Emitech K575X Sputter Coater
Equipment Type:
Metalization / Thin Film Deposition
Description:
Sputter coat non-conducting samples with Cr or Ir prior to SEM analysis. Turbo pump and Peltier cooled sputtering provide fine grain metal deposition desgined for FESEM analysis. One touch operation
Location
1420
Microscopy Lab
Veeco Scanning Probe Microscope
FEI Scios DualBeam FIB/SEM
FEI Apreo SEM
FEI Quanta FEG 250
Axio Fluorescence Microscope
Filmetrics Profilm3D Optical Profiler
Tousimis AutoSamdri 815A
Emitech K575X Sputter Coater
PLEASE USE FOM FOR EQUIPMENT RESERVATIONS