Denton Discovery 18 Sputter System
The Denton Discovery 18 is a three cathode (one RF, two DC) sputter system for deposition of metals and dielectrics. Nano3 supplies a wide variety of sputter targets for use in this system. RF bias may be applied to the sample stage for pre-deposition cleaning or descum. Stage heats to 300°C. Available process gases: Ar, O2, N2.
PLEASE USE FOM FOR EQUIPMENT RESERVATIONS