The PDS 2010 Labcoter 2 Parylene Deposition System can be used for deposition of Parylene (poly-para-xylylene) onto a variety of substrates. The clear polymer coating formed provides an extremely effective chemical and moisture barrier with high dielectric and mechanical strength. The coating is biocompatible and deposits in a highly conformal way. Substrates up to 6 inches in diameter can be accomodated, and film thicknesses up to ~10 microns can be deposited.