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Back End Processing
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Equipment
Name:
Zeiss Axio Imager Optical Microscope
Equipment Type:
Metrology
Description:
Reflected light bright-field.
Reflected light dark-field.
Transmitted light bright-field.
Objectives: 5x, 10x, 20x, 50x, 100x, 150x.
High resolution digital imaging (1388x1040 pixel resolution in color). Live image up to 20 frames/sec.
Location
1409
E-beam Lithography
Vistec EBPG 5200
Filmetrics F20 (2)
Zeiss Axio Imager Optical Microscope
PLEASE USE FOM FOR EQUIPMENT RESERVATIONS