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Room 1419 - Metrology
Equipment:
- Dektak 150
- DektakXT Stylus Profilometer
- HP 4155 Parametric Analyzer/Probe Station
- J.A. Woollam M-2000D Spectroscopic Ellipsometer
- Jandel Four Point Probe with RM3000 Test Unit
- Rudolph Auto EL Ellipsometer
- Toho Technology FLX-2320 Thin Film Stress Measurement System
- Veeco NT1100 Optical Profiling System