The DektakXT stylus profiler 10th generation thin and thick film step height and surface roughness measurement tool. It features a single-arch design for increased scan stability. The system provides a step-height measures of up to 1 mm with a repeatability of 0.4 nm (4 A) whilst using stylus forces between 1-15 mg. The fully motorized X, Y, Z, R stage accommodates 6 inch wafers and sample thickness up to 1.95 inches. The system is equipped with the latest Vision64 analysis software including stitching and pattern recognition.