Vapor treatment system allows the application of a self assembled monolayer (SAM) with antistiction properties. A silanizing agent: FOTS ((Tridecafluoro-1,1,2,2-tetrahydrooctyl) trichlorosilane) vapor, is used to prevent sticking during nanoimprint or soft lithography processes. After the treatment the mold can be reused multiple times and up to 10 4"wafers can be processed simultaneously.