Karl Suss MJB3 Mask Aligner
The MJB3 offers flexibility in handling of irregularly shaped substrates of differing thickness as well as standard sized substrates up to 3 inch diameter. Mask size: 2.5 inch 3 inch and 4 inch; Substrate sizes: pieces to 75 mm; Range of alignment: X, Y ± 10mm and Theta ± 10°.
The KSM is capable of 1 um resolution alignment.
PLEASE USE FOM FOR EQUIPMENT RESERVATIONS