Denton Discovery 635 Sputter System
The Denton Discovery 635 is a three cathode (one RF, two DC) sputter system for deposition of metals and dielectrics. The system is capable of RF bias for pre-deposition cleaning and descum. Stage can heat up to 450°C. Nano3 supplies a wide variety of sputter targets for use. Available process gases: Ar, O2, N2.
PLEASE USE FOM FOR EQUIPMENT RESERVATIONS