Nano3: Equipment

Name:

Zeiss Sigma 500

Equipment Type:

Materials Characterization

Description:

0.8nm resolution at 15kV
1.6nm resolution at 1kV
2.9nm resolution at 0.2kV
Superb imaging of insulating/soft materials without metal coating
STEM Detector
Backscatter Detector
Field free electrostatic final lens
Magnetic materials OK

Device Characterization

	Agilent B1500A Semiconductor Device Analyzer		Zeiss Sigma 500			Lindberg Mini-Mite Tube Furnace
UVO Cleaner					GDSII Editor PC #2

PLEASE USE FOM FOR EQUIPMENT RESERVATIONS