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Back End Processing
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Equipment
Name:
UVO Cleaner
Equipment Type:
Back End Processing
Description:
Utilizes ultraviolet generated ozone for effective organics removal.
Location
1416
Device Characterization
Agilent B1500A Semiconductor Device Analyzer
Zeiss Sigma 500
Lindberg Mini-Mite Tube Furnace
UVO Cleaner
GDSII Editor PC #2
PLEASE USE FOM FOR EQUIPMENT RESERVATIONS