Facility User Rates cleanroom floorplan personnel Courses

all equipment Back End Processing Dry Etching Ebeam Lithography Materials Characterization Metalization / Thin Film Deposition Metrology Photolithography Thermal Processing

UCSD Internal Users UC System Users Non-UC System External Users

Statement Evacuation Map Resources

Fabrication and Characterization E-Beam Lithography Dicing Microfluidics