Apreo HiVac is a Schottky Field Emission Scanning Electron Microscope (FESEM) that combines high and low-voltage ultra-high resolution capabilities with an electrostatic lens design. The instrument features beam deceleration and unique in-lens detection offering unprecedented contrast and versatility to researchers working with a variety of materials and devices. Achievable resolution is 0.8nm at 15kV and 1.0nm at 1kV using the immersion lens. The Pathfinder EDS software from Thermo Scientific enables user friendly energy dispersive X-ray microanalysis (EDX). The stage can accommodate samples up to 110mm diameter.