Nano3: Personnel

Category	Staff Contact	Email
Photolithography, Maskless Aligner, Nanofrazor	John Tamelier	jtamelier@ucsd.edu
E-beam Lithography	Maribel Montero	mmontero@ucsd.edu
Dry/Wet Etching	Xuekun Lu	xklu@ucsd.edu
Sputtering, Thermal/E-beam Evaporator, PECVD, ALD	Xuekun Lu	xklu@ucsd.edu
AFMs, Filmetrics, Profiler, Agilent	Conor Holzhall	cholzhall@ucsd.edu
Dicing, Wire Bonder	Jack Vitale	jvitale@ucsd.edu
Furnaces, Ovens, Parylene Coater	Alistair Vizuet	advizuet@ucsd.edu
FineTech Flip Chip Bonder	Xuekun Lu	xklu@ucsd.edu
TEM	Jeff Wu	jiw469@ucsd.edu
SEMs	Zhicheng Long	z1long@ucsd.edu
FIB	Zhicheng Long	z1long@ucsd.edu
Microfluidics	Zhicheng Long	z1long@ucsd.edu
Safety, Lab/Chemical Supplies	Benjamin Sachs	bsachs@ucsd.edu
Equipment Status Check	Patrick Driscoll	pdriscoll@ucsd.edu
Facility Access, Financial Issues	James Koga	jkoga@ucsd.edu
Report Equipment Problems		nano3-equipment@ucsd.edu
Submit Dicing Jobs		nano3-dicing@ucsd.edu
Service Inquiries, Other Questions	Fubo Rao	furao@ucsd.edu