facilities
Facility User Rates
cleanroom floorplan
personnel
Courses
equipment
all equipment
Back End Processing
Dry Etching
Ebeam Lithography
Materials Characterization
Metalization / Thin Film Deposition
Metrology
Photolithography
Thermal Processing
access
UCSD Internal Users
UC System Users
Non-UC System External Users
Safety
Statement
Evacuation Map
Resources
Services
Fabrication and Characterization
E-Beam Lithography
Dicing
Focused Ion Beam
Microfluidics
Transmission Electron Microscopy
Login
username:
password:
Remember me on this computer:
Lost username/ password
Equipment
Name:
FEI Scios DualBeam FIB/SEM
Equipment Type:
Materials Characterization
Description:
xT software version 7.x and new xT UI
NICol electron column
High-throughput ion column
Cryo stage
110 x 110 mm eucentric stage
Selective Carbon Mill
Insulator Enhanced Etch
Platinum Deposition (Pt)
FEI EasyLift LT NanoManipulator
In-lens detectors: Lower (T1) BSE and Upper (T2) SE
SE detector (ET-SED)
Oil-free pumping system
Integrated current measurement
Automatic aperture system
AutoSlice and View G3 Extended Package
AutoTEM G2
Bruker Quantax 400 60mm2 EDX
Location
1420
Microscopy Lab
Veeco Scanning Probe Microscope
FEI Scios DualBeam FIB/SEM
FEI Apreo SEM
FEI Quanta FEG 250
Axio Fluorescence Microscope
Filmetrics Profilm3D Optical Profiler
Tousimis AutoSamdri 815A
Emitech K575X Sputter Coater
PLEASE USE FOM FOR EQUIPMENT RESERVATIONS
