Welcome to the Nano3 facility at Calit2.

Nano3 provides advanced capabilities for fabrication and characterization in a state-of-the-art cleanroom opened in May 2006.

The name Nano3 reflects the synergetic nature of the facility, focusing on three fields of nanoscale research and development within the space - Nanoscience, Nanoengineering and Nanomedicine.

In addition to providing essential nanofabrication capabilities for research on electronic and optoelectronic materials and devices, the facility is intended to facilitate the pursuit of research in emerging, interdisciplinary, and rapidly growing fields such as biomedical and biochemical devices, heterogeneous integrated devices and circuits, and sensor technology.

The next cryo-processing period for our Oxford Plasmalab 100 RIE/ICP will be on Wednesday 7/8 and Thursday 7/9.

The system will be available exclusively for cryo-processing starting at 1PM on Wednesday during this period. The system will be back to normal operation the following Friday at 1PM.

Please remember that cryo-processing reservations for this period must be entered into the schedule 48 hrs prior (i.e. Monday, 1PM).

The e-beam writer training takes 5 days with each day split into one hour of presentation and two hours of practice on the system. There is a maximum of 3 spots for each training session, first come first served.

The training sessions will be scheduled based on demand. Please contact Maribel Montero to sign up.

Please remember that before you can sign up for this training you must complete all Nano3 access requirements.

Each orientation will be held for a maximum of seven users, first come first served. To sign up for your cleanroom safety orientation please click on Begin using the facilities and follow the instructions.

The groups will meet at the entrance to the cleanroom which is room 1401a in Atkinson Hall. Please arrive on time!