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Nano3 Facility User Rates (Effective 7/1/2024)
| Lab or Tool Self-use Rates | |||
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Rate ($/hr)
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UC System
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Not-for-profit (US) |
For-profit and
Non-US |
|
Cleanroom Use
Excludes Electron Beam Lithography (EBL) tool. |
$36
|
$56 |
$132
|
|
Analytical Lab (Non-Cleanroom) Use |
$22
|
$33 |
$98
|
| Scanning Electron Microscope (SEM) and Focused Ion Beam (FIB) | |||
| FEI Scios DualBeam FIB/SEM | $61 | $90 | $186 |
| FEI Quanta FEG250 SEM, FEI Apreo SEM | $50 | $74 | $142 |
| Zeiss Sigma 500 SEM | $57 | $84 | $164 |
| Transmission Electron Microscope (TEM) | |||
| ThermoFisher Talos F200X G2 S/TEM | $55 | $80 | $165 |
| Tool Training Rates | |||
| Applies to all training and authorization sessions. Training is not currently offered on the EBL tool. | |||
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Rate ($/hr)
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UC System
|
Not-for-profit (US) |
For-profit and
Non-US |
| All Cleanroom tools
Excludes Ebeam lithography (EBL) tool. Training is not currently offered on the EBL tool. |
$36 | $56 | $132 |
|
Analytical Lab (Non-Cleanroom) tools Excludes SEMs, FIB, TEM. |
$22 | $33 | $98 |
| Scanning Electron Microscope (SEM) and Focused Ion Beam (FIB) | |||
| FEI Scios DualBeam FIB/SEM | $146 | $225 | $336 |
| FEI Quanta FEG250 SEM, FEI Apreo SEM | $94 | $137 | $203 |
| Zeiss Sigma 500 SEM | $142 | $219 | $314 |
| Transmission Electron Microscope (TEM) | |||
| ThermoFisher Talos F200X G2 S/TEM | $129 | $187 | $272 |
| Staff-assisted Service Rates | |||
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Rate ($/hr)
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UC System
|
Not-for-profit (US) |
For-profit and
Non-US |
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General Staff Service
Includes, but not limited to, nanofabrication services, characterization services, staff project discussion meetings, EBL design/checking/sample preparation/spin-coating/sample developing services, etc. Excludes SEM, FIB, TEM services. |
$85
|
$135 |
$150
|
| Scanning Electron Microscope (SEM) and Focused Ion Beam (FIB) | |||
| FEI Scios DualBeam FIB/SEM | $146 | $225 | $336 |
| FEI Quanta FEG250 SEM, FEI Apreo SEM | $94 | $137 | $203 |
| Zeiss Sigma 500 SEM | $142 | $219 | $314 |
| Transmission Electron Microscope (TEM) | |||
| ThermoFisher Talos F200X G2 S/TEM | $129 | $187 | $272 |
| Electron Beam Lithography (EBL) | |||
| Raith Vistec EBPG 5200
Machine Time Excludes general staff assistance and associated cleanroom use charges. |
$165 | $239 | $330 |
| New User Fee | |||
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Fee ($/new user)
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UC System
|
Not-for-profit (US) |
For-profit and
Non-US |
|
Per new user
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$100
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$150 |
$150
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Training Courses
(Please see courses for more information)
| Training Course Rates | |||
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Rate ($/course)
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UC System
|
Not-for-profit (US) |
For-profit and
Non-US |
|
Training Course
|
$330
|
$479 |
$1,008
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Note that all rates are subject to change, pending annual review.