facilities
Facility User Rates
cleanroom floorplan
view cleanroom cameras
Analytical Labs
personnel
equipment
Back End Processing
Dry Etching
Ebeam Lithography
Materials Characterization
Metalization / Thin Film Deposition
Metrology
Photolithography
Thermal Processing
all equipment
access
UCSD internal users
non-UCSD external users
Safety
Statement
Evacuation Map
Resources
Login
username:
password:
Remember me on this computer:
Begin using facilities
Lost username/ password
View Cleanroom Cameras
Equipment
Equipment
Category
Room
Disco Automatic Dicing Saw 3220
Back End Processing
1416
West Bond Wire Bonder
Back End Processing
1435
Oxford Plasmalab 100 RIE/ICP
Dry Etching
1439
Oxford Plasmalab 80 RIE
Dry Etching
1439
Technics PEIIB Planar Etch
Dry Etching
1439
Tepla 100
Dry Etching
1439
Trion RIE/ICP Dry Etch
Dry Etching
1439
Raith50 E-beam Writer
Ebeam Lithography
1409
Raith50 GDSII Editor PC
Ebeam Lithography
1420
Horiba XRF Microscope
Materials Characterization
1420
Veeco Scanning Probe Microscope
Materials Characterization
1420
AJA DC Sputter Deposition Tool
Metalization / Thin Film Deposition
1435
AJA RF Sputter Deposition Tool
Metalization / Thin Film Deposition
1435
Denton 502A Ebeam Evaporator
Metalization / Thin Film Deposition
1405
Denton Desk IV Sputter Coater
Metalization / Thin Film Deposition
1409
Denton Discovery 18 Sputter System
Metalization / Thin Film Deposition
1425
Emitech K575X Sputter Coater
Metalization / Thin Film Deposition
1420
Oxford Plasmalab PECVD
Metalization / Thin Film Deposition
1429
Temescal BJD 1800 Ebeam Evaporator (1)
Metalization / Thin Film Deposition
1425
Temescal BJD 1800 Ebeam Evaporator (2)
Metalization / Thin Film Deposition
1425
Axio Fluorescence Microscope
Metrology
1420
Dektak 150
Metrology
1419
Dektak 3030
Metrology
1419
Filmetrics F20
Metrology
1417
Filmetrics F20 (2)
Metrology
1409
HP 4155 Parametric Analyzer/Probe Station
Metrology
1416
Phillips XL30 ESEM
Metrology
1420
Rudolph Auto EL Ellipsometer
Metrology
1419
Toho Technology FLX-2320 Thin Film Stress Measurement System
Metrology
1419
Veeco NT1100 Optical Profiling System
Metrology
1419
Zeiss Axio Imager Optical Microscope
Metrology
1409
HTG Mask Aligner
Photolithography
1405
Karl Suss MA6 Mask Aligner
Photolithography
1413
Karl Suss MJB3 Mask Aligner
Photolithography
1413
Quintel Mask Aligner
Photolithography
1413
AG Associates Heat Pulse 610 (1)
Thermal Processing
1431
AG Associates Heat Pulse 610 (2)
Thermal Processing
1431